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Fabrication and Study of Low Angle Biepitaxial Josephson Junction. We fabricated a new type of biepitaxial grain boundary Josephson junction utilizing an obliquely cut SrTiO3(STO) substrate. The lattice misorientation at the boundary was 20¡Æand 30¡Æ. The structure of the junction which was the grain boundary between the two domains made of YBCO layer ((a)-region) and YBCO/ CeO2/YSZ multilayer ((b)-region) was a b-axis tilt or a b-axis twist grain boundary. These structures were confirmed by X-ray diffraction(XRD) measurements. All junctions except 20¡Æ twist Josephson junction showed RSJ type I-V characteristics. The 20¡Æand 30¡Ætilt Josephson junctions showed clear SQUID oscillations. The modulation voltage of SQUID oscillations for 20¡Ætilt Josephson junction was 100 ㄍV at 20 K. And for 30¡Ætilt and twist Josephson junctions showed IcRn values as 14 ㄍV and 24 ㄍV at 77 K, respectively.
The YBCO in (a)-region grew with its crystalline axes parallel with those of STO substrate, while the YBCO in (b)-region grew with its c-axis normal to the surface. For the c-axis normal growth of the YBCO in (b)-region, the thickness of buffer layer(DCeO2, DYSZ) and the deposition temperature(Ts) of YBCO are important. The YBCO in (b)-region showed the better c-axis normal growth at the higher Ts, on the thinner CeO2, and on the thicker YSZ. However, on the thicker CeO2(less than 15 ¡Ê) and the thinner YSZ, the YBCO grew with its in-plane aligned better. For growing a good YBCO film with its c-axis normal to the surface and its ab-plane well aligned, the thickness of buffer layers should be selected carefully. The DCeO2 had the most dominant effect on the growth of the YBCO in (b)-region. In order to make the YBCO in (b)-region of a nearly single crystalline structure, the thickness of CeO2 was selected in the range of 12 ¡Ê¡15 ¡Ê.
We measured current-magnetic field (I-H) characteristics for the fabricated four junctions. Increasing the external H field, the Josephson currents(Is) for all junctions except the 20¡Ætwist junction were decreased. The decrease of Josephson current was more apparent in 30¡Æjunction than in 20¡Æjunction. And tilt junction showed much decrease of Is than twist junction. From the results of I-H curve measurements, we believe that tilt junction (or 30¡Æjunction) has a grain boundary of weaker link than twist junction (or 20¡Æjunction) and 20¡Ætwist junction has a grain boundary of non-weak link. Especially, for the 30¡Ætilt junction, we measured I-H curve at 5 K with fine increase of H field, which showed an anomalous Fraunhofer diffraction. The anomalous Fraunhofer diffraction can be understood assuming the nonuniformity of critical current density of junction which may exist in d-wave/d-wave Josephson junctions.